MEMS의 기초 (Foundations of MEMS , Chang Liu) 연습문제 solution(솔루션)
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작성일 19-11-05 03:08
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Download : [솔루션] MEMS의 기초(Foundations of MEMS, Chang Liu) 연습문제 솔루션.zip
그리고 1장의 한 부분을 발췌하면!(설계 부분에서는 수식이 나오나 여기서 나타내기에는 제한이 있으므로 책과 맞는지 확인하고 받으시길 바랍니다.
SOLCpt01 Introduction
SOLCpt02 IntroFab
SOLCpt03E lecMechConcepts
SOLCpt04E lectrostatic
SOLCpt05 Thermal
SOLCpt06 Piezoresistive
SOLCpt07 Piezoelectric
SOLCpt08 Magnetic
SOLCpt09- Summary
SOLCpt10 FabBulk
SOLCpt11- 5FabSurface
SOLCpt12- 5PolymerMEMS
SOLCpt13- 2Fluidic
SOLCpt14-5 SPM
SOLCpt15-4O pticalMirror
SOLCpt16 ProcessIntegration
으로 구성 되어있습니다..^^)
Problems
Problem 1: Review
Read the following sections in the paper titled silicon as a mechanical material by Kurt
Petersen: Sections I, II, IV, VI, VIII [10]. The paper can be found in the library or on-line.
Problem 2: Review
Locate the following MEMS-specific journals and conference proceedings in your library or online:
(1) Sensors and Actuators (S&A); (2) Proceedings of IEEE Annual International Workshop
on Micro Electro Mechanical Systems (the name was changed to IEEE International Conference
on Micro Electro Mechanica
MEMS의,기초,(Foundations,of,MEMS,,Chang,Liu),연습문제,솔루션,기계설계,솔루션
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솔루션/기계설계
MEMS의 기초 (Foundations of MEMS , Chang Liu) 연습문제 solution(솔루션)
설명
순서
다.
